Highlights

• High-Rigid Aerostatic Spindle (Built-in motor)
  • The pros of aerostatic spindle includes high cleanliness, high RPM, long lifespan, low noise and low vibration.
  • The spindle DmN value is 1 million, and rotary accuracy can reach 0.1 µm.
  • The rigidity of spindle can reach 60KG / µm.
  • The power of Spindle can reach 15Kw / 18.5Kw.
  • A central coolant-through Spindle (Opt.)
• High rigidity of Aerostatic working table
  • High Cleanliness of aerostatic working table equips with vacuum chuck, and the direct driven ability enables low runout.
  • Rotary accuracy of worktable can achieve 0.1 µm.
  • Worktable equips with vacuum suction and central coolant through designs.
  • The torque is able to reach 60Nm/ 130Nmm.
  • Direct Driven Motor.
• High-accurate ball screw
  • C0 grade high precision ball screw enables high effeciency and high accurate performance.
• Linear Guides
  • SP grade high precision linear guide enables high accuracy of performance.
• Processing accuracy
  • Resolution of Z axis feeding drive is 0.1µm which enables precise positioning.
  • The grinding accuracy of TTV 12 inch wafers can achieve 3µm.
  • The Surface Roughness for wafer with #2000 grinding wheel reaches Ra0.00012mm